Diagnostic test for ion implantation dosimetry
نویسندگان
چکیده
منابع مشابه
Diagnostic test for ion implantation dosimetry
Ion implantation has become an accepted tool in the fabrication of solid-state devices. Two reasons for the widespread use of ion implantation are its potential for precise doping control and for reproducibility. However, effects peculiar to ion impact on solids can interfere with accurate dosimetry and thereby jeopardize these primary advantages of ion implantation. Diagnostic techniques are t...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science and Technology
سال: 1979
ISSN: 0022-5355
DOI: 10.1116/1.570106